The advanced Plasma Enhanced CVD system is ideal for the passivation of dielectric films (for example, SixNy, SiO 2), amorphous silicon, silicon carbide, hard mask deposition ... available Carrier gas ...

Let us help you with your inquiries, brochures and pricing requirements Request A Quote Download PDF Copy Download Brochure The Orion III Plasma Enhanced Chemical ...

Chemical Vapor Deposition (CVD) is a widely used technique in materials ... the temperature of the reaction chamber or the substrate is raised to facilitate the reaction. Plasma-enhanced CVD (PECVD) ...

Applications and target industries include plasma enhanced chemical vapor deposition "PECVD" of silicon, carbon, oxides and nitrides for absorber and passivation layer, for optical filter stacks as ...

and VECTOR plasma-enhanced CVD products. It also provides SPEED gapfill high-density plasma chemical vapor deposition products; and Striker single-wafer atomic layer deposition products for ...

CVD involves the chemical reaction of gaseous precursors on a heated substrate to form a thin film. CVD techniques, such as plasma-enhanced CVD (PECVD) and low-pressure CVD (LPCVD), enable the ...